febid#
FEBID Simulator package
Deposition process code |
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Module for continuous process data recording |
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Main internal data framework |
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Diffusion module Solution for diffusion equation via FTCS method |
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Control core of the simulation |
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Heat transfer module |
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Extension modules. |
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Monte Carlo electron beam – matter interaction simulation subpackage |
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Stream-file reader and pattern generator |
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Scripting template for running series of simulations |